Abstract: Copper foils with smooth surface were prepared by simplified electrochemical polishing process,and then the copper foils before and after electrochemical polishing were taken as the substrate to prepare graphenes by chemical vapor deposition (CVD) method.The relationship between copper foil surface morphology and graphene quality was studied via atomic force microscopy (AFM),optical microscopy(OM),scanning electron microscopy (SEM),energy dispersive spectrometer (EDS),Raman spectrum and I-V measurements.Surface oxidation method was used to judge the growth quality of the graphene.The results show that the graphene grown on the copper foil after polishing had a small number of defects,integrated morphology and obviously improved conductivity.Surface oxidation method could rapidly and accurately judge the growth quality of the graphene.