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    任鑫, 赵瑞山, 黄美东, 张翀翊, 王乾宝. 脉冲负偏压幅值对复合离子镀制备TiCN薄膜结构和性能的影响[J]. 机械工程材料, 2017, 41(1): 56-60,64. DOI: 10.11973/jxgccl201701012
    引用本文: 任鑫, 赵瑞山, 黄美东, 张翀翊, 王乾宝. 脉冲负偏压幅值对复合离子镀制备TiCN薄膜结构和性能的影响[J]. 机械工程材料, 2017, 41(1): 56-60,64. DOI: 10.11973/jxgccl201701012
    REN Xin, ZHAO Rui-shan, HUANG Mei-dong, ZHANG Chong-yi, WANG Qian-bao. Effects of Pulsed Negative Bias Amplitudes on Structure and Properties of TiCN Film Prepared by Compound Ion Plating Technology[J]. Materials and Mechanical Engineering, 2017, 41(1): 56-60,64. DOI: 10.11973/jxgccl201701012
    Citation: REN Xin, ZHAO Rui-shan, HUANG Mei-dong, ZHANG Chong-yi, WANG Qian-bao. Effects of Pulsed Negative Bias Amplitudes on Structure and Properties of TiCN Film Prepared by Compound Ion Plating Technology[J]. Materials and Mechanical Engineering, 2017, 41(1): 56-60,64. DOI: 10.11973/jxgccl201701012

    脉冲负偏压幅值对复合离子镀制备TiCN薄膜结构和性能的影响

    Effects of Pulsed Negative Bias Amplitudes on Structure and Properties of TiCN Film Prepared by Compound Ion Plating Technology

    • 摘要: 采用复合离子镀技术,在不同脉冲负偏压幅值下于304不锈钢表面制备TiCN薄膜,研究了负偏压幅值对薄膜成分、结构、表面粗糙度、显微硬度及摩擦磨损性能的影响。结果表明:随着负偏压幅值升高,钛、碳与氮元素的原子比以及碳与钛元素的原子比先增大后减小,薄膜表面的颗粒及针孔、凹坑等缺陷尺寸减小,数量减少,表面形貌得到改善;薄膜主要由TiCN相组成,随着负偏压幅值增大出现(111)晶面择优取向,且薄膜的显微硬度先增大后减小,并在负偏压幅值为300 V时达到最大,为2 690 HV;薄膜的摩擦磨损性能优于基体的,随着负偏压幅值增加,薄膜的摩擦因数不断降低,在负偏压幅值为300 V时约为0.355,此时薄膜的摩擦磨损性能最优。

       

      Abstract: TiCN film was prepared on 304 stainless steel at different pulse negative bias amplitudes by the compound ion plating technology. The effects of pulse negative bias amplitude on composition, structure, surface roughnesss, microhardness and friction and wear properties of the film were studied. The results show that, with the increase of negative bias amplitude, the atom ratio of Ti and C to N first increased and then decreased, as well as the ratio of C to Ti. The size of particles, pinholes and pits on the film surface decreased, and their quantity also reduced with the increase of negative bias amplitude, these improve the surface morphology of the film. The film was mainly composed of TiCN phase, presenting the (111) preferred orientation with the increase of negative bias amplitude. In addition, microhardness of the film first increased then decreased with the increase of negative bias amplitude, reaching a maximum of 2 690 HV at 300 V. Friction and wear properties of the film are always better than that of the substrate, and the friction coefficient of TiCN film decreased with the increase of negative bias amplitude; when the negative bias amplitude was 300 V, the friction coefficient was up to 0.355, indicating that the optimal friction and wear properties was achieved.

       

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