Abstract: The electron beam refining technique was used to refine Ti₃Ni alloy. The removal mechanism of TiO₂ and TiN inclusions in Ti₃Ni alloy was studied. The results show that under the refining conditions, the temperature at the melt center was the highest, was 2 681.2 K, which was much higher than the melting point of TiO₂. The TiO₂ inclusions on the melt surface and near the surface were mainly removed by disslution. Under the refining conditions, the lowest disslution temperature of TiN inclusions was 2 671.5 K, which was slightly lower than the temperature at the melt center, and the lowest decomposition temperature of TiN was 1 869.6 K, which was far lower than the temperature at the melt center. The TiN inclusions on the melt surface and near the surface could be removed by disslution and decomposition.