Development and Reliability of Micro-Scale Indentation Testing Equipment
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摘要: 基于Oliver-Pharr方法和断裂韧度测试方法成功研制了一台微米尺度压痕测试设备,使用有限元方法对其机械可靠性进行验证,并利用该设备测试了高纯铝和氧化锆陶瓷的力学性能参数,验证设备的测试性能。结果表明:所研制的微米尺度压痕测试设备结构稳定,设计合理,闭环控制稳定性好,噪声水平较低,满足测试要求。采用该设备在不同压入载荷下测得高纯铝及氧化锆陶瓷的硬度、弹性模量以及断裂韧度与使用标准压痕设备测试得到的结果一致,相对误差小于7%,证明了该设备测试结果的准确性。
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关键词:
- 压痕测试设备 /
- 有限元方法 /
- Oliver-Pharr方法 /
- 力学性能参数
Abstract: Based on the Oliver-Pharr method and the fracture toughness test method, a micro-scale indentation testing equipment was successfully developed. Its mechanical reliability was verified by the finite element method, and the mechanical property parameters of the high-purity aluminum and zirconia ceramics were tested by the equipment to verify the test performance of the equipment. The results show that the developed micro-scale indentation testing equipment had stable structure, reasonable design, good closed-loop control stability and low noise level, and met the test requirements. The hardness, elastic modulus and fracture toughness of high-purity aluminum and zirconia ceramics measured by this equipment under different indentation loads were consistent with the results obtained by standard indentation equipment, and the relative error was smaller than 7%, which proved the accuracy of the test results of the equipment. -
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