Research Progress on Affecting Factors of Diamond-Like Carbon FilmTribological Properties and Improvements
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摘要: 类金刚石（diamond-like carbon，DLC）是一类含有金刚石结构（sp3杂化键）和石墨结构（sp2杂化键）的亚稳态非晶物质，具有高硬度、耐腐蚀、低摩擦因数、耐磨损等优良特性，但也存在着由于制备工艺、沉积参数等不同导致的内应力大、热稳定性差、摩擦学行为敏感等问题，大大限制了其产业化应用。从固有因素和外界因素2个方面综述了影响DLC薄膜摩擦学性能的因素，从异质元素掺杂、表面织构化等方面论述了改善DLC薄膜摩擦学性能的措施，展望了DLC薄膜摩擦学性能研究趋势。Abstract: Diamond-like carbon (DLC) is a kind of metastable amorphous material containing diamond structure (sp3 hybrid bond) and graphite structure (sp2 hybrid bond), and has excellent characteristics such as high hardness, corrosion resistance, low friction coefficient, wear resistance. However, DLC also has problems such as large internal stress, poor thermal stability and sensitive tribological behavior caused by different preparation process and deposition parameters, which greatly limits its industrial application. The affecting factors of DLC film tribology properties are summarized from two aspects of the intrinsic factors and external factors. The improvements of DLC film tribology properties are discussed from heterogeneous elements doping and surface texture. The research trend of tribological properties of DLC film is prospected.
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Keywords:
- DLC film /
- tribological property /
- influencing factor /
- surface texture /
- element doping
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