Abstract: Based on the model of element volatilization pattern of electron beam refined Inconel 718 alloy, the short-time and long-time melting electron beam smelting layered solidification processes were designed,and the element volatilization pattern of Inconel 718 alloy prepared by electron beam smelting layered solidification and the influence of the smelting time and the layer mass on the element volatilization behavior were investigated. The results show that in order to achieve precise element controlling of Inconel 718 alloy by electron beam smelting layered solidification, the layer mass should be controlled to at least 450 g when the electron beam power was 12 kW and the refining time was 10 min. During the electron beam smelting layered solidification, the melting time should be reduced as much as possible (less than 240 s), and the electron beam power should directly increase to 12 kW for refining, which could effectively avoid excessive mass loss caused by long-term melting. The increase of the layer mass had little effect on the volatilization of alloying elements during the electron beam smelting layered solidification, but was beneficial to the precise controlling of alloy composition.