氮含量对Ti-B-C-N薄膜微观结构和性能的影响
Effect of Nitrogen Content on Microstructure and Properties of Ti-B-C-N Films
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摘要: 采用反应磁控溅射法在高速钢基体上制备氮原子分数分别为10.8%,15.6%,28.1%,36.4%的Ti-B-C-N薄膜,研究了氮含量对薄膜微观结构、硬度和摩擦磨损性能的影响。结果表明:Ti-B-C-N薄膜均由α-Fe和Ti(C,N)纳米晶组成,具有Ti(C,N)纳米晶镶嵌在非晶基体相中的纳米复合结构;随着氮含量增加,非晶相含量增加,Ti(C,N)纳米晶的含量和晶粒尺寸减小;随着氮含量增加,Ti-B-C-N薄膜的显微硬度增大,摩擦因数和磨损率均减小,表面磨痕变浅,磨损机制由剥落和微观犁削转变为微观抛光。Abstract: Ti-B-C-N films with nitrogen atom fractions of 10.8%, 15.6%, 28.1%, 36.4% were prepared on high speed steel matrix by reactive magnetron sputtering. The effects of nitrogen content on microstructure, hardness and friction and wear properties of the films were studied. The results show that the Ti-B-C-N films were all composed of α-Fe and Ti(C, N) nanocrystals, and had a nano-composite structure composed of Ti(C, N) nanocrystals embedding in amorphous matrix phase. With the increase of nitrogen content, the content of amorphous phases increased, and the content and grain size of Ti (C, N) nanocrystals decreased. With the increase of nitrogen content, the microhardness of the Ti-B-C-N films increased, and the friction coefficient and the wear rate decreased; the surface wear marks became shallow, and the wear mechanism changed from spalling and micro-ploughing to micro-polishing.