Abstract: The hydrogen induced cracking behavior of 316L stainless steel was simulated by using ABAQUS finite element analysis software through sequential coupling method based on the cohesive zone model related to hydrogen concentration. The effects of grain size (35, 25, 15 μm), stress concentration coefficients (4.0, 2.6) and stress (500, 312 MPa) on hydrogen induced cracking were investigated. The simulated results were compared with the test results. The results show that the cohesive zone model could simulate the hydrogen induced cracking behavior of 316L stainless steel well, and the relative errors between the simulated and test results of the hydrogen induced crack lengths were all less than 15%. When the stress concentration coefficient or stress was relatively large, the hydrogen induced crack was relatively long. With the decrease of grain size, the length and the intergranular characteristics of hydrogen induced cracks decreased, and the hydrogen embrittlement susceptibility of the 316L stainless steel decreased.