Abstract: A finite element model of particle deposition during cold spraying was established by ANSYS FLUENT software, and was verified by estimation formula of particle impact velocity. Single factor influence research of gas pressure (0.5,0.7,0.9,1.1,1.3 MPa), gas temperature (400,500,600,700,800 K), and standoff distance (15,20,25,30,35 mm) on particle acceleration characteristics was conducted by the finite element model. The effect of interaction between process parameters on particle acceleration characteristics was analyzed by response surface methodology. The results show that the average relative error between simulated and estimated particle impact velocities under different process parameters was 5.37%, which verified the reliability of the finite element model. With the increase of gas pressure, the particle velocity increased, with the average increase of particle impact velocity under adjacent gas pressure of 50 m · s⁻¹, but the particle temperature did not change significantly. With the increase of gas temperature, the particle temperature increased, with the average increase of particle impact temperature under adjacent gas temperature of 60 K, but the particle velocity did not change significantly. As the standoff distance increased, the particle velocity and particle temperature did not change significantly. The gas pressure had the most significant effect on particle velocity, followed by gas temperature, and the standoff distance had the least effect. The interaction of gas pressure and gas temperature had the most significant effect on particle velocity, followed by the interaction of gas pressure and standoff distance, and the interaction of gas temperature and spraying distance had the least effect.