Abstract: In order to improve the hardness and wear resistance of titanium alloy surface, physical vapor deposition (PVD) technology is often used to prepare coatings on its surface. The common PVD coatings such as diamond-like carbon coating, modified nitride coating, compound nitride coating and gradient coating are introduced. The characteristics of common PVD technologies such as magnetron sputtering technique, ion plating technique, ion beam assisted deposition technique and vacuum evaporation plate technique are systematically expounded. The process parameters to control the wear performance of the coating such as substrate bias, sputtering power, deposition pressure, deposition temperature and cathode arc current are summarized. The existed question of PVD wear resistant coating was pointed out, and the development trent was prospected.