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    黄彪, 周琼, 王雅琪, 安琦. 硅、铬掺杂对TiAlN基涂层微观结构及摩擦学性能的影响[J]. 机械工程材料, 2024, 48(9): 67-73. DOI: 10.11973/jxgccl240036
    引用本文: 黄彪, 周琼, 王雅琪, 安琦. 硅、铬掺杂对TiAlN基涂层微观结构及摩擦学性能的影响[J]. 机械工程材料, 2024, 48(9): 67-73. DOI: 10.11973/jxgccl240036
    HUANG Biao, ZHOU Qiong, WANG Yaqi, AN Qi. Effect of Si and Cr Doping on Microstructure and Tribological Properties of TiAlN-Based Coating[J]. Materials and Mechanical Engineering, 2024, 48(9): 67-73. DOI: 10.11973/jxgccl240036
    Citation: HUANG Biao, ZHOU Qiong, WANG Yaqi, AN Qi. Effect of Si and Cr Doping on Microstructure and Tribological Properties of TiAlN-Based Coating[J]. Materials and Mechanical Engineering, 2024, 48(9): 67-73. DOI: 10.11973/jxgccl240036

    硅、铬掺杂对TiAlN基涂层微观结构及摩擦学性能的影响

    Effect of Si and Cr Doping on Microstructure and Tribological Properties of TiAlN-Based Coating

    • 摘要: 分别以Ti0.5Al0.5、Ti0.5Al0.4Cr0.1、Ti0.5Al0.4Si0.1为靶材,采用电弧离子镀技术制备了TiAlN涂层、TiAlSiN涂层和TiAlCrN涂层,研究了硅、铬掺杂(二者掺杂量近似相同)对TiAlN基涂层微观结构、力学性能以及摩擦学性能的影响。结果表明:TiAlN涂层、TiAlSiN涂层和TiAlCrN涂层均结构致密,与基体结合良好,呈柱状晶生长,呈现较强的(200)晶面择优取向;硅、铬元素掺杂使得涂层晶粒细化,其中硅元素掺杂形成的Si3N4非晶相对(Ti,Al)N纳米晶生长有抑制作用,TiAlSiN涂层的晶粒尺寸最小。硅、铬元素掺杂提高了涂层的硬度和内应力,并且硅掺杂的提升效果更好;硅、铬掺杂降低了涂层的硬度与弹性模量的比值和结合力,并且硅掺杂的降低幅度更大,TiAlSiN涂层的韧性最差;硅元素和铬元素的掺杂均能降低TiAlN涂层的摩擦因数和磨损率,硅掺杂对摩擦因数的降低幅度高于铬掺杂,对磨损率的降低幅度低于铬掺杂。

       

      Abstract: With Ti0.5Al0.5, Ti0.5Al0.4Cr0.1 and Ti0.5Al0.4Si0.1 as target materials, TiA1N coating, TiAlSiN coating and TiAlCrN coating were prepared by arc ion plating technique. The effects of doping of Si and Cr with almost the same amount on the microstructure, mechanical properties and tribological properties of TiAlN-based coatings were investigated. The results show that the TiAlN coating, TiAlSiN coating and TiAlCrN coating had compact structure, well combined with the substrate, grew in columnar crystal, and exhibited a preferential orientation of (200) plane. Si and Cr doping made the grain of the coating finer. Si3N4 amorphous phase formed by Si doping inhibited the growth of (Ti,Al)N nanocrystals, and the TiAlSiN coating had the smallest grain size. The Si and Cr doping could improve the hardness and internal stress of the coating, and the Si doping had a higher improvement effect. The Si and Cr doping reduced the ratio of hardness to elastic modulus and adhesion force of the coating, and the reduction degree was larger after Si doping, indicating that TiAlSiN coating had the worst toughness. The doping of both Si and Cr could reduce the friction coefficient and wear rate of TiAlN coating.The friction cofficient decrease degree after Si doping was higher than that after Cr doping, and the wear rate decrease degree was lower than that after Cr doping.

       

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