Abstract: The TiO2 single-layer film,TiO2/Ti and TiO2/Ti/TiN/Ti multilayer films were prepared on the 17-4PH stainless steel by unbalance magnetron sputtering.The phase composition,microhardness,wear resistance and antifatigue corrosion resistance of the films were investigated by using X-ray diffraction,profilemeter,vickers microhardness tester,friction and wear tester and steam corrosion fatigne test equipment.The results indicate that the hardness,wear resistance and corrosion fatigue resistance of the 17-4PH stainless steel with surface film were greatly improved.Compared with the TiO2 single-layer film and the TiO2/Ti/TiN/Ti multilayer film,the TiO2/Ti multilayer film had the best wear resistance which was increased by 20 times.The antifatigue corrosion resistance of the multilayer film was the best.