Abstract: The surface of titanium alloy was carburized by vacuo-heating technology.The constituents and phase structure of the carburized surface were determined by X-ray diffraction .The wear resistance of the carburized surface was tested using a CETR UMT22 multifunction wear tester.The morphology of worn surface was observed by SEM. The experimental results showe that TiC phase is formed in the surface of alloy and the maximum hardness of surface is 876 HV.The wear resistance of carburized layer is improved obviously.The main are mechanisms of titanium alloy were plastic deformation,plough with plasma lubricating.