Abstract:
Taking Cr30Al70( atomic percent) as composite target, vacuum arc ion plating technology was used to prepare a series of CrAlN coatings on stainless steel substrates at different substrate negative bias voltages. The composition, surface morphology, phase structure, roughness, micro-hardness, friction and wear properties and interfacial adhesion property were analyzed systematically by energy dispersive spectroscopy, X-ray diffraction, scanning electron microscopy, roughness testing, micro-hardness testing, scratch testing, friction and wear testing, etc. The results show that the value of x(Cr)/x(Cr+Al) increased first and then decreased with the increase of the bias voltage, the value reached maximum when the negative bias voltage was 150 V, and its composition was near to that of the target. When the negative bias voltage was 200 V, the coatings had maximal surface roughness, the coating′s crystallinity and the hardness were fair high, and the crystalline phase was face centered cubic AlN with Cr solid solution. Not only was the roughness of the coating, but also the content of Al in amorphous phase and innerstress of the coatings closely related to the friction and wear properties of the coating. The substrate bias voltage had fair little effect on the interfacial adhesion property when the preparing progress for interface transition layer was same.