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    张永宏, 蒋百灵, 严少平. 掺铬类石墨碳膜的显微组织与摩擦性能[J]. 机械工程材料, 2010, 34(5): 40-45.
    引用本文: 张永宏, 蒋百灵, 严少平. 掺铬类石墨碳膜的显微组织与摩擦性能[J]. 机械工程材料, 2010, 34(5): 40-45.
    ZHANG Yong-hong, JIANG Bai-ling, YAN Shao-ping. Microstructure and Friction Properties of Cr-Doped Graphite-Like Carbon Films[J]. Materials and Mechanical Engineering, 2010, 34(5): 40-45.
    Citation: ZHANG Yong-hong, JIANG Bai-ling, YAN Shao-ping. Microstructure and Friction Properties of Cr-Doped Graphite-Like Carbon Films[J]. Materials and Mechanical Engineering, 2010, 34(5): 40-45.

    掺铬类石墨碳膜的显微组织与摩擦性能

    Microstructure and Friction Properties of Cr-Doped Graphite-Like Carbon Films

    • 摘要: 采用非平衡磁控溅射离子镀技术在不同衬底上制备了不同铬含量的掺铬类石墨非晶碳膜;用X射线光电子能谱仪、扫描电子显微镜、高分辨透射电子显微镜和拉曼光谱仪等分析了碳膜的成分、表面形貌、显微组织和碳键结构;通过销-盘摩擦试验机测试了碳膜在干摩擦及不同润滑条件下的摩擦因数.结果表明:适量掺铬碳膜可保持纯碳膜均一、无结晶的显微组织;掺铬对碳膜中碳元素的价键结构产生了重要影响,随着铬含量的增大,sp2碳原子在碳膜中的含量先增大后减小,使得掺铬碳膜的sp2碳含量比纯碳膜的更高;适量掺铬能有效降低碳膜的摩擦因数,而掺铬碳膜的摩擦因数随着铬含量增大的变化趋势与碳膜的碳键结构变化明显相关.

       

      Abstract: Cr-doped graphite-like amorphous carbon films with various Cr contents were deposited on different substrates by unbalanced magnetron sputter ion plating technique.X-ray photoelectron spectroscopy,scanning electron microscopy,high resolution transmission electron microscopy and Raman spectroscopy were used to characterize the composition,surface morphology,microstructure and carbon bond structure of the films.The friction coefficient of films in dry friction and different lubricated conditions was measured by means of pin-on-disk friction testing.The results show that adding appropriate Cr into the graphite-like carbon films could keep the pure carbon films homogeneous and non-crystalline.Incorporating Cr into the film had significant influence on bond structure of carbon element in the film.With increasing Cr content,the fraction of sp2 carbon atom in the film increased first,and then decreased.Thereby,the carbon films incorporated with Cr could possess more sp2 carbon atoms than the pure carbon film.Appropriate amount of Cr incorporation could effectively reduce the friction coefficient of the graphite-like carbon film.The trend of friction coefficient of Cr-doped graphite-like carbon films obviously depended on the evolvement of bond structure of carbon element in the films with increasing Cr content.

       

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