微机电系统用电铸镍铁合金的制备及其电磁性能

Composition and Electromagnetic Property of Elctrofomed Ni-Fe Alloys for MEMS

摘要: 研究了电铸镍铁合金制备过程中工艺条件对电铸层成分的影响,获得含铁质量分数20%电铸层的最佳工艺条件为镀液硫酸亚铁含量6 g/L、pH值2.5、温度55 ℃、电流密度3.5 A/dm2;讨论了镀层形貌及电磁性能的变化关系.结果表明：制备的镀层表面光亮、结构致密,晶面为(111)、(220)、(200).该铸镍铁合金矫顽力最小为2.95×10-2 A/m,表现出较强的顺磁性.剩磁力随着铸层铁含量的增大呈下降趋势,饱和磁化强度为IJ85合金的10%,具有优良的电磁性能.可以用于制造微型磁执行器与传感器元件.

Abstract: The relationship between coating microstructure and electromagnetic properties of electroformed Ni-Fe alloys was studied.And the optimum process parameters to obtain Ni-20%Fe deposition were as follows:FeSO4·7H2O concentration 6 g/L;pH value 2.5;current density 3.5 A/dm2;electrolyte temperature 55 ℃.The Ni-Fe deposit is bright and compact,the crystal-planes of the plating are (111),(220) and (200).Electrodeposited Ni-20%Fe has a strong paramagnetism effect with the smallest remanence of 0.5 emu.The coercivity show a monotonic decrease with increasing Fe content in deposit,and the saturation magnetization is only 10% of that of the IJ85 permalloy,indicating that the electroformed Ni-20%Fe alloy has good electromagnetic property and could be used in MEMS actuator manufacturing.