Abstract: Taking Ba(OH)2 solution as eletrolyte, alternative current (AC) and direct current (DC) power microarc oxidation (MAO) technologies were used to deposite BaTiO3 films on industrial pure titanium plate, and the phase composite, surface morphology and ferroelectric properties of the films were characterized. The results show that the films deposited by DC /AC power microarc oxidation were mainly composed of tetragonal and hexagonal BaTiO3 phase, respectively. Holes with diameter of hundreds of nanometer to a few microns and cracks distributed uniformly on the films surface. The BaTiO3 film with hexagonal phase had not ferroelectric properties until it was annealed at high temperature for a long time, and the ferroelectric BaTiO3 film could be prepared directly by DC power microarc oxidation technology.