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    张海平, 王守仁, 郭培全. TiAlN基薄膜的研究进展[J]. 机械工程材料, 2013, 37(4): 1-5.
    引用本文: 张海平, 王守仁, 郭培全. TiAlN基薄膜的研究进展[J]. 机械工程材料, 2013, 37(4): 1-5.
    ZHANG Hai-ping, WANG Shou-ren, GUO Pei-quan. Research Progress of TiAlN-Based Thin Films[J]. Materials and Mechanical Engineering, 2013, 37(4): 1-5.
    Citation: ZHANG Hai-ping, WANG Shou-ren, GUO Pei-quan. Research Progress of TiAlN-Based Thin Films[J]. Materials and Mechanical Engineering, 2013, 37(4): 1-5.

    TiAlN基薄膜的研究进展

    Research Progress of TiAlN-Based Thin Films

    • 摘要: 综述了TiAlN薄膜、TiAlN纳米多层膜、TiAlN纳米复合薄膜的研究进展, 主要介绍了3种薄膜的硬度、摩擦磨损等性能, 并对影响其性能的因素进行了分析, 提出了薄膜制备所存在的问题, 最后对其今后的发展做了展望。

       

      Abstract: The research progress of TiAlN films, TiAlN nano multilayer films and TiAlN nano composite films were reviewed, and the properties of three sorts of films such as hardness, friction and wear, and so on, were also introduced. Influence factors to above properties of TiALN-based thin films were analyzed as well. Problems existing in the coating preparation were presented, and then the future developments of three kinds of TiAlN-based films were previewed.

       

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