钛铝系金属间化合物薄膜的制备和摩擦性能

Tribological Properties and Preparation of Ti-Al Intermetallic Film

摘要: 应用射频磁控溅射方法沉积钛铝系金属间化合物薄膜;用X射线衍射仪(XRD)、配有能谱仪(EDS)的扫描电子显微镜(SEM)和UMT-2型摩擦试验机对薄膜的相组成、形貌和摩擦性能进行了分析.结果表明:该薄膜是由TiAl、TiAl3、Al2O3和TiO2相组成;薄膜表面晶粒均匀细小;对于不同钛、铝含量的薄膜,当铝含量(原子分数)为45%时具有最低的摩擦因数;摩擦因数随着载荷、转速和摩擦时间的增加而减小.

Abstract: Radio frequency (RF) magnetron sputtering was used to prepare Ti-Al intermetallics film.The film was examined by XRD.The surface morphology of the film was analyzed by SEM with an attached EDS.The tribological properties of the film were tested by UMT-2 friction test apparatus.Generally,the film is composed of TiAl,TiAl3,Al2O3 and TiO2.The crystal grains of the film are uniform and fine.The film with 45at%Al showed the lowest friction coefficient.The friction coefficient reduced with the increase of load,rotation rate and friction time.