Abstract: A Ti-doped DLC film was prepared on the foil air bearing (FAB) materials of 40Cr steel, bearing element BeCu foil and silicon chip by the mid-frequency unbalanced magnetron sputtering technique. The structure, friction and wear properties, adhension strength and inner stress of the film were characterized. The results show that the film had more sp2 bonds, and had a good bonding with the substrate. The friction and wear reduction of the friction pairs of the two bearing materials deposited DLC films was good, the friction coefficienct was 0.06-0.08, and the wear rate was 4.8×10-8 mm3·N-1·m-1. The film could be used for the solid lubrication of FAB.