Abstract: The simulation for indentation testing of Si-containing diamond-like carbon(Si-DLC) film was carried out by infinite element simulation software Abaqus using loading and displacement methods, and the hardness of the diamond-like carbon film with different silicon contents was obtained. The results show that the two methods fit fairly well, the displacement method was fairly stable and its speed also was fairly quick, and the hardness of Si-DLC film decreased with the increase of the silicon content. The finite element simulation was in agreement with correlative experiments.