Abstract: Mo-Si-N coating was prepared on Mo substrate by aminolysis nitriding and salt ihrigizing molten methods.The microstructure, elemental distribution and phase were studied by scanning electron microscopy and X-ray diffraction, and the high-temperature oxidation resistance of the coating at 1 600 ℃ was analyzed. The results show that Mo-Si-N coating prepared on Mo substrate consisted of MoSi2 and Si3N4 phases, compact SiO2 film was formed on coating surface when the coating was oxidized at high temperature, and high temperature cyclic oxidation life of the coating was 48 h.