Abstract: About 2 μm thick diamond-like-carbon (DLC) films doped W were prepared on the matrixes of 40Cr,Si(100),stamless steel respectively by means of unbalanced magnetron sputtering and ion source complex deposition using pure CH4 and N2 as reaction gases and pure W as sputtering targets.A transition layer between diamond-like-carbon film and matrix was deposited.Raman spectroscopy,Auger depth profiling,X-ray diffraction and nano-indentation were used to characterize the composition,microstructure and properties of the multilayer films.The results show that a typical,smooth,uniform and dense DLC film with the doped W and formed W2C interspersed within it was obtained,and the doped W dispersively distributed in amorphous carbon.A low friction coefficient and high hardness,as well as a good bonding strength of over 70 N were obtained with W about 20at%.