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    蒋芳, 杨勇, 黄政仁. 反射镜用SiC陶瓷表面改性涂层的研究进展[J]. 机械工程材料, 2012, 36(12): 1-4.
    引用本文: 蒋芳, 杨勇, 黄政仁. 反射镜用SiC陶瓷表面改性涂层的研究进展[J]. 机械工程材料, 2012, 36(12): 1-4.
    shu
    JIANG Fang, YANG Yong, HUANG Zheng-ren. Research Progress of SiC Ceramic Surface Modification with Coating for Mirror[J]. Materials and Mechanical Engineering, 2012, 36(12): 1-4.
    Citation: JIANG Fang, YANG Yong, HUANG Zheng-ren. Research Progress of SiC Ceramic Surface Modification with Coating for Mirror[J]. Materials and Mechanical Engineering, 2012, 36(12): 1-4.
    shu

    反射镜用SiC陶瓷表面改性涂层的研究进展

    Research Progress of SiC Ceramic Surface Modification with Coating for Mirror

      摘要
    • 摘要: 综述了反射镜用SiC陶瓷表面改性涂层的研究现状, 重点介绍了化学气相沉积(CVD)和物理气相沉积(PVD)制备SiC涂层和硅涂层的优缺点及制备机理, 并讨论了SiC陶瓷光学部件表面改性今后的发展方向。

       

      Abstract: The recent development of SiC ceramic surface modification with coating was summaried. The merits and demerits of chemical vapor deposition (CVD) through which the SiC coating and the Si coating were prepared were introduced as well as physical vapor deposition (PVD). The future development of SiC surface modification was also discussed.

       

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