Abstract: A continuous and compact Zr-alloyed layer with good metallurgical bonding was prepared on 0Cr18Ni9Ti austenite stainless steel substrate surface by double-glow plasma surface alloying technology,and the kinetics of double-glow plasma Zr surface alloying at 1 060 ℃ was studied. The results show that,increasing the distance from the Zr-alloyed layer surface,the Zr element content exhibited a graded decrease trend and the diffusion coefficient decreased gradually,while diffusion activation energy increased gradually. Vacancy density of the Zr-alloyed layer surface was approximately 2.945×(1012-1013) cm-2,which increased 1 to 2 orders of magnitude comparing with that by conventional surface alloying technology at same temperature.