Microstructure and Nanoindentation Mechanical Properties of WS₂ Film withDifferent Doping Elements by Magnetron Sputtering

The WS₂ film, Ti/WS₂ composite film and La-Ti/WS₂ composite film were prepared by magnetron sputtering under different deposition pressures (0.8, 1.2 Pa). The microstructure and nanoindentation mechanical properties of the films were studied. The results show that the WS₂ film had a loose and porous structure with coarse grains and many pores; the density of microstructure was poor. Compared with those of the WS₂ film, the grain size of the Ti/WS₂ composite film was reduced and the structure was densified. The doping of lanthanum further reduced the grain size of the film, and the microstructure was more compact. The doping of lanthanum also reduced the atomic ratio of sulfur to tungsten in the film, increased the relative content of the hard tungsten phase, and finally increased the hardness and deformation resistance of the film.