Microstructure and Nanoindentation Mechanical Properties of WS<sub>2</sub> Film withDifferent Doping Elements by Magnetron Sputtering

HE Jiangtao; CAI Haichao; XUE Yujun; YANG Fang; MA Xiqiang

doi:10.11973/jxgccl202012004

Materials and Mechanical Engineering > 2020 > 44(12): 24-28,36. > DOI: 10.11973/jxgccl202012004

HE Jiangtao, CAI Haichao, XUE Yujun, YANG Fang, MA Xiqiang. Microstructure and Nanoindentation Mechanical Properties of WS₂ Film withDifferent Doping Elements by Magnetron Sputtering[J]. Materials and Mechanical Engineering, 2020, 44(12): 24-28,36. DOI: 10.11973/jxgccl202012004

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Microstructure and Nanoindentation Mechanical Properties of WS₂ Film withDifferent Doping Elements by Magnetron Sputtering

1. College of Mechanical and Electrical Engineering, Henan University of Science and Technology, Luoyang 471003, China;
2. Henan Key Laboratory for Machinery Design and Transmission System, Henan University of Science and Technology, Luoyang 471003, China;
3. Luoyang Bearing Research Institute Co., Ltd., Luoyang 471039, China

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Received Date: December 09, 2019
Revised Date: November 01, 2020

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Abstract

Abstract

The WS₂ film, Ti/WS₂ composite film and La-Ti/WS₂ composite film were prepared by magnetron sputtering under different deposition pressures (0.8, 1.2 Pa). The microstructure and nanoindentation mechanical properties of the films were studied. The results show that the WS₂ film had a loose and porous structure with coarse grains and many pores; the density of microstructure was poor. Compared with those of the WS₂ film, the grain size of the Ti/WS₂ composite film was reduced and the structure was densified. The doping of lanthanum further reduced the grain size of the film, and the microstructure was more compact. The doping of lanthanum also reduced the atomic ratio of sulfur to tungsten in the film, increased the relative content of the hard tungsten phase, and finally increased the hardness and deformation resistance of the film.
- magnetron sputtering,
- WS₂ film,
- lanthanum doping,
- grain size,
- nanoindentation mechanical property

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Microstructure and Nanoindentation Mechanical Properties of WS2 Film withDifferent Doping Elements by Magnetron Sputtering

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