Research Progress on Affecting Factors of Diamond-Like Carbon FilmTribological Properties and Improvements

Diamond-like carbon (DLC) is a kind of metastable amorphous material containing diamond structure (sp³ hybrid bond) and graphite structure (sp² hybrid bond), and has excellent characteristics such as high hardness, corrosion resistance, low friction coefficient, wear resistance. However, DLC also has problems such as large internal stress, poor thermal stability and sensitive tribological behavior caused by different preparation process and deposition parameters, which greatly limits its industrial application. The affecting factors of DLC film tribology properties are summarized from two aspects of the intrinsic factors and external factors. The improvements of DLC film tribology properties are discussed from heterogeneous elements doping and surface texture. The research trend of tribological properties of DLC film is prospected.