Effect of Underlay Materials and Sputtering Method on Adhesive Force of CNx Films

CNx films were prepared by DC and RF magnetron sputtering with W18Cr4V high-speed steel and YG8 hard alloy underlay.The adhesive force of CNx films was studied by scratch test.The research indicate that the adhesive force of CNx films is high when YG8 hard alloy was applied as underlay.The adhesive force of CNx films can be enhanced when YG8 underlay is corroded or TiN middle transition layer is added.RF magnetron sputtering is in favor of the adhesive force of CNx films for both W18Cr4V and YG8 underlay.