Effects of Substrate Negative Bias Voltage on Microstructure and Properties of CrAlN Coatings

CHANG Wei; MU Ren-de; SHANG Xiao-yu; HE Li-min; LU Feng; TANG Zhi-hui

Materials and Mechanical Engineering > 2012 > 36(7): 32-37.

CHANG Wei, MU Ren-de, SHANG Xiao-yu, HE Li-min, LU Feng, TANG Zhi-hui. Effects of Substrate Negative Bias Voltage on Microstructure and Properties of CrAlN Coatings[J]. Materials and Mechanical Engineering, 2012, 36(7): 32-37.

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Effects of Substrate Negative Bias Voltage on Microstructure and Properties of CrAlN Coatings

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Received Date: February 21, 2012

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Abstract

Taking Cr30Al70( atomic percent) as composite target, vacuum arc ion plating technology was used to prepare a series of CrAlN coatings on stainless steel substrates at different substrate negative bias voltages. The composition, surface morphology, phase structure, roughness, micro-hardness, friction and wear properties and interfacial adhesion property were analyzed systematically by energy dispersive spectroscopy, X-ray diffraction, scanning electron microscopy, roughness testing, micro-hardness testing, scratch testing, friction and wear testing, etc. The results show that the value of x(Cr)/x(Cr+Al) increased first and then decreased with the increase of the bias voltage, the value reached maximum when the negative bias voltage was 150 V, and its composition was near to that of the target. When the negative bias voltage was 200 V, the coatings had maximal surface roughness, the coating′s crystallinity and the hardness were fair high, and the crystalline phase was face centered cubic AlN with Cr solid solution. Not only was the roughness of the coating, but also the content of Al in amorphous phase and innerstress of the coatings closely related to the friction and wear properties of the coating. The substrate bias voltage had fair little effect on the interfacial adhesion property when the preparing progress for interface transition layer was same.
- vacuum arc ion plating,
- composite target,
- CrAlN coating,
- microstructure

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[1]	赵时璐, 李友, 张钧, 等.刀具氮化物涂层的研究进展[J].金属热处理, 2008, 39(9): 99-104.
[2]	KAYANI A, BUCHANAN T L, KOPCZYK M, et al. Oxidation resistance of magnetron-sputtered CrAlN coatings on 430 steel at 800 ℃[J].Surface and Coatings Technology, 2003, 201(7):4460-4466.
[3]	MAN B Y, GUZMAN L, MIOTELLO A, et al. Microstructure, oxidation and H2-permeation resistance of TiAlN films deposited by DC magnetron sputtering technique[J].Surface and Coatings Technology, 2004, 9(14):180-181.
[4]	CHIM Y C, DING X Z, ZENG X T, et al. Oxidation resistance of TiN, CrN, TiAlN and CrAlN coatings deposited by lateral rotating cathode arc[J].Thin Solid Films, 2009, 517(17): 4845-4849.
[5]	卢国英, 林国强. 脉冲偏压电弧离子镀CrAlN薄膜研究[J].真空科学与技术研究, 2006, 26(6): 441-445.
[6]	陈利.Ti-Al-N基硬质涂层的热稳定性能、微结构及其力学、切削性能的研究[D].长沙: 中南大学, 2009.
[7]	ROMERO J, GOMEZ M A, ESTEVE J, et al. CrAlN coatings deposited by cathodic arc evaporation at different substrate bias[J].Thin Solid Films, 2006, 515(1):113-117.
[8]	HARISH H C, SELVAKUMAR N, DEEPTHI B, et al. A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings[J].Surface and Coatings Technology, 2006, 201(6):2193-2201.
[9]	卢国英.脉冲偏压电弧离子镀CrAlN薄膜性能研究[D].大连: 大连理工大学, 2006.
[10]	LIN G Q, ZHAO Y H, GUO H M, et al. Experiments and theoretical explanation of droplet elimination phenomenon in pulsed-bias arc deposition[J].Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 2004, 22(4):1218-1222.
[11]	蔡志海, 底月兰, 张平.活塞环表面CrAlN涂层的微观组织与抗高温氧化性能[J].中国表面工程, 2010, 23(6): 15-19.
[12]	AYAKO K, MASAHIRO K, HIROYUKI H, et al. Anisotropic lattice expansion and shrinkage of hexagonal TiAlN and CrAlN films[J].Surface and Coatings Technology, 2003, 169/170:367-370.
[13]	REITER A E, DERFLINGER V H, HANSELMANN B, et al. Investigation of the properties of Al1-xCrxN coatings prepared by cathodic arc evaporation[J].Surface and Coatings Technology, 2005, 200(7):2114-2122.
[14]	WANG L P, ZHANG G G, WOOD R J K, et al. Fabrication of CrAlN nanocomposite films with high hardness and excellent anti-wear performance for gear application[J].Surface and Coatings Technology, 2010, 204(21/22):3517-3524.
[15]	HARISH H C, SELVAKUMAR N, DEEPTHI B, et al. A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings[J].Surface and Coatings Technology, 2006, 201(6):2193-2201.
[16]	MASAHIRO K, AYAKO K H, TETSUYA S. Oxidation resistance of Cr1-xAlxN and Ti1-xAlxN films[J].Surface and Coatings Technology, 2003, 165(2):163-167.
[17]	余春燕, 王社斌, 尹小定, 等.CrAlN薄膜高温抗氧化性的研究[J].稀有金属材料与工程, 2009, 38(6): 1015-1018.
[18]	UCHIDA M, NIHIRA N, MITSUO A, et al. Friction and wear properties of CrAlN and CrN films deposited by cathodic arc ion plating method[J].Surface and Coatings Technology, 2004, 177/178:627-630.
[19]	LUGSCHEIDER E, BOBZIN K, HORNIG T, et al. Investigation of the residual stresses and mechanical properties of (Cr, Al)N arc PVD coatings used for semi-solid metal(SSM) forming dies[J].Thin Solid Films, 2002, 420/421:318-323.
[20]	XU Z H, HE S M, HE L M, et al. Novel thermal barrier coatings based on La2(Zr0.7Ce0.3)2O7/8YSZ double-ceramic-layer systems deposited by electron beam physical vapor deposition[J].Journal of Alloys and Compounds, 2011, 509:4273-4283.
[21]	胡奈赛, 徐可为, 何家文. 涂、镀层的结合强度评定[J].中国表面工程, 1998, 11(1):31-35.

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