Research Progress of TiAlN-Based Thin Films
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Abstract
The research progress of TiAlN films, TiAlN nano multilayer films and TiAlN nano composite films were reviewed, and the properties of three sorts of films such as hardness, friction and wear, and so on, were also introduced. Influence factors to above properties of TiALN-based thin films were analyzed as well. Problems existing in the coating preparation were presented, and then the future developments of three kinds of TiAlN-based films were previewed.
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