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ZHANG Xin, XIAO Xiao-ling, HONG Rui-jiang, LUO Cheng-ping, LIN Song-sheng. Microstructure and Properties of Diamond-like-carbon Film Doped W[J]. Materials and Mechanical Engineering, 2009, 33(9): 79-84.
Citation: ZHANG Xin, XIAO Xiao-ling, HONG Rui-jiang, LUO Cheng-ping, LIN Song-sheng. Microstructure and Properties of Diamond-like-carbon Film Doped W[J]. Materials and Mechanical Engineering, 2009, 33(9): 79-84.
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Microstructure and Properties of Diamond-like-carbon Film Doped W

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  • Received Date: June 10, 2009
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    • Abstract
  • About 2 μm thick diamond-like-carbon (DLC) films doped W were prepared on the matrixes of 40Cr,Si(100),stamless steel respectively by means of unbalanced magnetron sputtering and ion source complex deposition using pure CH4 and N2 as reaction gases and pure W as sputtering targets.A transition layer between diamond-like-carbon film and matrix was deposited.Raman spectroscopy,Auger depth profiling,X-ray diffraction and nano-indentation were used to characterize the composition,microstructure and properties of the multilayer films.The results show that a typical,smooth,uniform and dense DLC film with the doped W and formed W2C interspersed within it was obtained,and the doped W dispersively distributed in amorphous carbon.A low friction coefficient and high hardness,as well as a good bonding strength of over 70 N were obtained with W about 20at%.
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    • References (20)
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