Microstructure of V₂O₅ Thin Films Prepared by Sol-Gel Method and then Heat-treated with Different Temperatures

Use V2O5 powders as raw materials and H2O2 as solvent, V2O5 thin films were prepared on ITO conducting glass substrates by electromagnetism-ultrasonic-stirred inorganic sol-gel technology. The influence of the heat treatment temperature on the morphology and structure of V2O5 thin films was studied. The results show that the V2O5 thin film was amorphous structure crystal at room temperature, β-V2O5 phase appeared after heat treatment at 400 ℃, all were β-V2O5 phase when the heat treatment temperature was 450 ℃, and the α-V2O5 appeared again after 500 ℃. The surface of the thin film was smooth and homogeneous, and particles appeared after heat treatment at 350-400 ℃. The surface morphology after 450 ℃ were piled up by petaloid, sheet and short-clavate polycrystal, and which was made up by clavate polycrystal after 500 ℃.