Deposition of BN Films by Radio Frequency Magnetron Sputtering

The film of boron nitride(BN) was deposited on the surface of T10 steel by the method of radio frequency magnetron sputtering at room-temperature.With optical microscope,friction and wear spectrometer and scratch spectrometer,the influence of the parameters of sputtering time,sputtering power and interface layer on the film was studied.The results showed that the friction factor of BN film was about half of that of the steel based materials,and the cohesion between film and substrate could obviously be increased by the Ni-P interface layer.