Structure and Properties of TiO₂-CeO₂ Thin Films Propared by Magnetron Sputtering on Polymer Substrate

TiO2-CeO2 thin films on PET(polyethylene terephthalate) substrates were prepared by radio-frequency magnetron sputtering (RF-MS).Phase constitution,surface morphology and UV-VIS transmittion of the composite films were investigated with XRD,SEM and UV-VIS spectral photometer.The as-deposited films deposited on PET were all amorphous.The crystal phase of the films is only anatase TiO2 after the films annealed at 150 ℃ for 12 h.With increasing sputtering power,crystal grains increased.The grain shape is sphere.When sputtering power is 100 W,the size of grains is about 120 nm.The enhancement of sputtering power reduce the transmittion of the films.Different sputtering times change the surface morphology and transmittion of the composite films.