Effect of Sputtering Deposition Parameters on Mechanical Properties,Microstructure and Composition of TiAlN Coatings

TiAlN coatings were deposited with Ti-Al target by reactive magnetron sputtering.TiAlN coatings with different mechanical properties,microstructure and element composition were detected by nanoindentor,EDS,XRD,etc.The effect of parameters on nanohardness and composition of coatings were studied.With the increase of N2 partial pressure,the thickness of coatings decreased and the orientation of coatings shifted from (111) to (220) and (311).The percentage of N atoms increased and the percentage of Ti,Al atoms decreased.With the increase of bias voltage,the nanohardness and critical load of coatings increased,reaching to 48.73 GPa and 40 N.