Effect of N<sub>2</sub> Flow Rate on Structure and Property of CrN Coatings Deposited by DC Reactive Magnetron Sputtering

TAN Shu-yong; ZHANG Xu-hai; WU Xiang-jun; JIANG Jian-qing

TAN Shu-yong, ZHANG Xu-hai, WU Xiang-jun, JIANG Jian-qing. Effect of N2 Flow Rate on Structure and Property of CrN Coatings Deposited by DC Reactive Magnetron Sputtering[J]. Materials and Mechanical Engineering, 2010, 34(7): 34-37.

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Effect of N₂ Flow Rate on Structure and Property of CrN Coatings Deposited by DC Reactive Magnetron Sputtering

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Chromium nitride(CrN)coating was deposited by DC reactive magnetron sputtering.The effect of N2 flow rate on microstructure,surface morphology,hardness and bonding force of the CrN coating was studied.The results show that when N2 flow rate changed from 30% to 100%,the coating was mainly composed of CrN phase.With the increase of N2 flow rate the grain shape of CrN coatings changed from pyramidal to the coexistence pyramidal and spheroidal topography,and the coatings became denser,which led to the improvement of the hardness.The effect of N2 flow rate on bonding force of the coating was weak.

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Effect of N2 Flow Rate on Structure and Property of CrN Coatings Deposited by DC Reactive Magnetron Sputtering

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Effect of N₂ Flow Rate on Structure and Property of CrN Coatings Deposited by DC Reactive Magnetron Sputtering